Technical Program
Paper Detail
Paper: | IVM.P.6 | ||
Session: | Image, Video and Multimedia (P) | ||
Time: | Tuesday, July 9, 15:20 - 17:00 | ||
Presentation: | Poster | ||
Topic: | Image, Video, and Multimedia: | ||
Title: | STUDY ON PHASE ERROR FOR PARTIAL INTENSITY SATURATION IN PHASE MEASURING PROFILOMETRY | ||
Authors: | Zhao Jing; School Of Electrical Engineering And Information, Sichuan University | ||
Wang Yongchang; KLA-Tencor | |||
Liu Kai; School Of Electrical Engineering And Information, Sichuan University |