Technical Program
Paper Detail
| Paper: | TAM.P.8 | ||
| Session: | Theory and Methods (P) | ||
| Time: | Tuesday, July 9, 13:20 - 15:00 | ||
| Presentation: | Poster | ||
| Topic: | Signal / Information Processing Theory and Methods: | ||
| Title: | ERROR REDUCTION FOR THE HIGH-CONTRAST REGIONS IN PHASE MEASURING PROFILOMETRY | ||
| Authors: | Xiaochang Xu; Sichuan University | ||
| Yongchang Wang; KLA-Tencor | |||
| Kai Liu; Sichuan University | |||