Tutorial 9: Microsystems and Nanotechnology Through Applications

Instructors

Veljko Milanovic; Adriatic Research Institute
Daniel T. McCormick; Adriatic Research Institute

Time & Location

All Day Sunday, May 23, 08:30 - 16:15, Location: Port Alberni

Abstract

This course will provide an introduction to the emerging fields of Micro- and Nano-engineering as they apply to radio frequency applications (RF), optical applications, and biomedical applications. Optical and RF elements are batch-fabricated and/or assembled on-chip with other microsensors as well as with microactuators to form integrated functional systems. MEMS technology and potentially bio-nanotechnology is highly attractive for commercial applications, since it leverages the integrated circuit infrastructure, which enables high volume production of microsystem components at a low manufacturing cost. This new choice in manufacturing technology will result in high throughput devices that are lighter, more efficient, and are easier and less expensive to produce.

Nanotechnology and nanoscience merge traditional boundaries between life sciences and physical sciences, enabling exploration of synthesis of shapes and structures at the molecular level. This course summarizes state-of-the-art research and technology in the nanotechnology field as it relates to the fundamental science and potential applications in materials, thermoelectrics, electronics, and biomedical devices.

The purpose of this tutorial is to introduce fundamental areas of microsystems and nanotechnology design, fabrication, and applications to newcomers and to strengthen the interdisciplinary knowledge base of seasoned researchers. Although in the limited time the topics can not be addressed in great depth, at the same time they will address the latest results in several application fields such as microoptics, RF MEMS, nano-bio technology, biosensors, etc. This should both provide a strong introduction as well as motivation to researchers that are interested in pursuing some of the topics or are currently doing so. Such a tutorial should spark and motivate discussions that relate to a variety of CAS topics that will be addressed over the duration of the conference. Finally, they will give the CAS researchers a perspective on the convergence of several fields of science and engineering taking place in these fascinating new realms of research and commerce.

Presenter Information

Veljko Milanovic was born in Rijeka, Croatia in September 1972. He received a B.S. in Computer Engineering in 1994, and M.S. and D.Sc. degrees in Electrical Engineering - Microelectronics in 1996 and 1998, respectively, all from The George Washington University. From 1994 to 1999, Veljko was a guest researcher in the Semiconductor Electronics Division of the National Institute of Standards and Technology, developing CMOS-compatible micromachined passive microwave structures and other MEMS. After graduation, and until 2001, he was a post-doctoral researcher at the Berkeley Sensor and Actuator Center of UC Berkeley, performing research in the area of design and microfabrication of microelectromechanical systems (MEMS) for RF applications, vacuum microelectronics, and optical communications. Subsequently, he founded and currently heads the Adriatic Research Institute, a non-profit scientific and education organization in Berkeley, CA. Veljko is now also a part-time researcher in the Nanoengineering Laboratory of the Mechanical Engineering Department at UC Berkeley.

Daniel T. McCormick received a BSE in Biomedical Engineering and Electrical Engineering in 1999 from Duke University and MS as well as PhD degrees from Cornell University in 2002 and 2003, respectively, both in Electrical and Computer Engineering. Daniel’s doctoral dissertation focused on micro-electromechanical systems (MEMS) for in-vivo optical coherence tomography imaging and radio-frequency (RF) applications. Since his graduation Daniel has been a post-doctoral researcher in the Berkeley Sensor and Actuator Center at the University of California at Berkeley, continuing his research on the RF and bio-medical applications of MEMS. His research interests also include integration of MEMS and microelectronics for high-precision instrumentation. Daniel has also joined the Adriatic Research Institute as a Microsystems engineer and a course-instructor.

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